Wafer-level micro-optics fabrication

Wafer-level micro-optics fabrication by lens molding using UV-curable polymers

Polymer refractive microlenses are the core of micro-optical modules. For small form factor modules, the manufacturing process is based on UV lens molding at wafer level. Whereas alternative lithography methods are limited in their ability to manufacture complex optical structures at wafer level, nanoimprint lithography (NIL) and lens molding are insensitive to shape and complexity, rendering them suitable for high-volume production.

In cooperation between DELO Industrial Adhesives and EVG, this whitepaper presents a qualified industrial solution covering process and materials for high-quality lens fabrication with excellent and reproducible pattern fidelity along the whole process.


Wafer-level micro-optics fabrication

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