White paper
PFAS-Free UV Imprint Lithography for Microlens Fabrication
Achieve precision, uniformity, and sustainability in large-scale optical manufacturing
UV-based imprint lithography is a high-resolution, scalable technique for replicating micro- and nanostructures, particularly suited for optoelectronics such as co-packaged optics (CPO). Traditional soft PDMS stamps exhibit dimensional drift due to swelling, limiting process stability for large-scale manufacturing.
Discover how a new, sustainable UV imprint process—combining innovative DELO stamp and resist materials with advanced SUSS equipment—enables fast, stable, and highly uniform microlens fabrication with low TTV on 300 mm wafers for large-scale optical manufacturing.
What can you expect in this white paper?
- Advanced SUSS MicroTec equipment integration including automated resist dispensing, wedge error compensation, and interferometric gap control
- PFAS-free material technology featuring DELO PHOTOBOND VE 556992 and DELO KATIOBOND OM6611 for superior process stability
- Comprehensive uniformity analysis demonstrating total thickness variation (TTV) below 5 µm across multiple 300 mm wafers
- Material comparison studies showing advantages over traditional soft PDMS stamps in dimensional stability
- Process optimization results proving minimal variation in lens dimensions and consistent separation behavior
Why this innovative solution?
- Superior long-term process stability with PFAS-free, UV-curable stamp materials eliminating dimensional drift
- High-throughput manufacturing enabled by advanced equipment features and reproducible imprinting processes
- Exceptional uniformity critical for optical performance in co-packaged optics applications
- Sustainable mass production positioning this material combination as ideal for efficient large-scale manufacturing
Your advantages at a glance
- Outstanding uniformity: Total thickness variation (TTV) below 5 µm achieved across multiple 300 mm wafers
- Superior process stability: PFAS-free materials eliminate dimensional drift and swelling issues of traditional PDMS stamps
- High-resolution scalability: Advanced equipment integration enables reproducible imprinting for optoelectronics applications
- Consistent performance: Minimal variation in lens dimensions with reliable separation behavior
- Sustainable manufacturing: PFAS-free formulations support environmentally responsible mass production
Let us inspire you!
Explore how this collaborative development between SUSS and DELO establishes new standards for sustainable, precise, and efficient microlens fabrication, positioning this material combination as the strong candidate for co-packaged optics manufacturing.
Download the white paper now and discover the future of PFAS-free UV imprint lithography!
About DELO
DELO is a leading provider of high-tech adhesives and has been offering solutions for the semiconductor, automotive, and electronics industries for over 25 years. Our innovative technologies set industry standards. Companies such as Bosch, Huawei, and Siemens trust DELO when it comes to superior adhesive technologies.
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